Alignment Stage Module Type SA...M is a low-section and large sized precision positioning stage in which Alignment Module AM having an angle adjustment mechanism is arranged on the same plane, and can perform XYθ motion. |
The Advent of SA250M having a Profile Height of Merely 65 mm!
IKO Alignment Stage SA...M is a XYθ stage having extremely low profile height of single layer structure, and it arranges a plurality of Alignment Module AM that has angle adjustment mechanism on the same flat surface. To the table sizes 420 and 800 that adopt large diameter open core structure, 250 was added for small applications, and a total line-up of three sizes was made. It is most suitable as alignment mechanism for manufacturing equipment and inspection equipment related to semiconductors and flat panel displays. |
Miniature Alignment Module AM25 was newly added. Alignment Module AM that realizes construction of various alignment stages. For miniature applications, AM25 having a height of 47 mm, a width of 86 mm was added. The variations include a total of 4 sizes up to AM86. |